{"product_id":"9781118062777","title":"Atomic Layer Deposition","description":"Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.","brand":"Tommi Kääriäinen","offers":[{"title":"Default Title","offer_id":47810428535102,"sku":"9781118062777","price":7279.0,"currency_code":"ZAR","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0784\/4357\/7662\/products\/9781118062777_30932941-51e6-4510-846f-eb0aba52a7fd.jpg?v=1707411444","url":"https:\/\/exclusivebooks.co.za\/products\/9781118062777","provider":"Exclusive Books Online","version":"1.0","type":"link"}